5. 特种气体
5.3 稀有气体
稀有气体（如氖气、氪气和氙气）的纯度从标准纯度到超高纯度不等，可用于工业、医疗、电子和航空领域。其中一些应用包括利用氙气提高手术成功率、氙气驱动的航天器、通过氙气和氪气改善照明，以及在高隔热窗户中使用氪气。
| 氙气 | ||
|---|---|---|
| 组成 | 纯氙气 (N48) | 超纯氙气 (N50) |
| H₂O | ≤ 1.0 ppm | ≤ 1.0 ppm |
| O₂ | ≤ 2.0 ppm | ≤ 1.0 ppm |
| N₂ | ≤ 5.0 ppm | ≤ 2.0 ppm |
| H₂ | ≤ 1.0 ppm | ≤ 0.5 ppm |
| Ar | ≤ 2.0 ppm | ≤ 1.0 ppm |
| CnHm | ≤ 0.5 ppm | ≤ 0.5 ppm |
| CO | ≤ 1.0 ppm | ≤ 0.5 ppm |
| CO2 | ≤ 1.0 ppm | ≤ 0.5 ppm |
| CF4 | ≤ 1.0 ppm | ≤ 0.1 ppm |
| C2F6 | - | ≤ 0.1 ppm |
| SF6 | - | ≤ 0.1 ppm |
| Kr | ≤ 5.0 ppm | ≤ 2.0 ppm |
| 氪气 | ||
|---|---|---|
| 组成 | 纯氪气 (N48) | Extra-Pure Kr (N50) |
| H2O | ≤ 1.0 ppm | ≤ 1.0 ppm |
| O2 | ≤ 2.0 ppm | ≤ 1.0 ppm |
| N2 | ≤ 5.0 ppm | ≤ 2.0 ppm |
| H2 | ≤ 1.0 ppm | ≤ 0.5 ppm |
| Ar | ≤ 2.0 ppm | ≤ 1.0 ppm |
| CnHm | ≤ 0.5 ppm | ≤ 0.5 ppm |
| CO | ≤ 1.0 ppm | ≤ 0.5 ppm |
| CO2 | ≤ 1.0 ppm | ≤ 0.5 ppm |
| CF4 | ≤ 1.0 ppm | ≤ 0.5 ppm |
| Xe | ≤ 5.0 ppm | ≤ 2.0 ppm |
| 低纯度氪气 (N₂O) | ||
| H2O | ≤ 10.0 ppm | 不包括 |
| O2+N2+H2+Xe | ≤ 1.0% | 不包括 |
| 氖气 | |
|---|---|
| 组成 | 纯氖气 (N50) |
| Ne | ≥ 99.999% |
| O2 | ≤ 0.1 ppm |
| N2 | ≤ 0.5 ppm |
| CO2 | ≤ 0.1 ppm |
| CO | ≤ 0.1 ppm |
| H2O | ≤ 0.1 ppm |
| H2 | ≤ 0.5 ppm |
| THC | ≤ 0.5 ppm |
| He | ≤ 3.0 ppm |