5. SG Products
5.2 Rare Gases
Rare gases such as Kr, Xe & Neon are key molecules for some specific applications in Semiconductor & memory chips, Space, Glass & Insulated Glazing, Lighting, Research, Flate Panel Display and Healthcare.
| XENON | |||
|---|---|---|---|
| Components | Pure Xenon (N45) | Extra-Pure Xenon (N50) | |
| Xe | 99.995% | 99.999% | |
| H2O | < 3 ppm | < 1 ppm | |
| O2 | < 3 ppm | < 1 ppm | |
| N2 | < 10 ppm | < 3 ppm | |
| CnHm | < 2 ppm | < 1 ppm | |
| CO | - | < 0.1ppm | |
| CO2 | < 0.5 ppm | < 0.5 ppm | |
| Kr | < 35 ppm | < 3 ppm | |
| KRYPTON | |||
|---|---|---|---|
| Components | Pure Kr (N45) | Extra-Pure Kr (N50) | |
| Kr | 99.995% | 99.999% | |
| H2O | < 3 ppm | < 1 ppm | |
| O2 | < 3 ppm | < 1 ppm | |
| N2 | < 10 ppm | < 3 ppm | |
| CnHm | ≤ 1 ppm | < 0.5 ppm | |
| CO | - | < 0.1 ppm | |
| CO2 | < 0.2 ppm | < 0.2 ppm | |
| Xe | < 35 ppm | < 5 ppm | |
| NEON | |||
|---|---|---|---|
| Components | Pure NEON (N40) | Pure NEON (N50) | |
| Ne | >99.99% | ≥ 99.999% | |
| O2 | < 3 ppm | <1 ppm | |
| N2 | < 15 ppm | < 3 ppm | |
| CO2 | - | < 0.1 ppm | |
| H2O | < 3 ppm | < 1 ppm | |
| H2 | < 2 ppm | < 0.5 ppm | |
| THC | - | < 0.2 ppm | |
| He | < 80 ppm | < 4 ppm | |