5. Other Gases
5.3 Rare Gases
Rare gases such as Kr, Xe & Neon are key molecules for some specific applications in Semiconductor & memory chips, Space, Glass & Insulated Glazing, Lighting, Research, Flate Panel Display and Healthcare.
| XENON | ||
|---|---|---|
| Components | Pure Xenon (N48) | Extra-Pure Xenon (N50) |
| H2O | ≤ 1.0 ppm | ≤ 1.0 ppm |
| O2 | ≤ 2.0 ppm | ≤ 1.0 ppm |
| N2 | ≤ 5.0 ppm | ≤ 2.0 ppm |
| H2 | ≤ 1.0 ppm | ≤ 0.5 ppm |
| Ar | ≤ 2.0 ppm | ≤ 1.0 ppm |
| CnHm | ≤ 0.5 ppm | ≤ 0.5 ppm |
| CO | ≤ 1.0 ppm | ≤ 0.5 ppm |
| CO2 | ≤ 1.0 ppm | ≤ 0.5 ppm |
| CF4 | ≤ 1.0 ppm | ≤ 0.1 ppm |
| C2F6 | ≤ 0.1 ppm | |
| SF6 | ≤ 0.1 ppm | |
| Kr | ≤ 5.0 ppm | ≤ 2.0 ppm |
| KRYPTON | ||
|---|---|---|
| Components | Pure Kr (N48) | Extra-Pure Kr (N50) |
| H2O | ≤ 1.0 ppm | ≤ 1.0 ppm |
| O2 | ≤ 2.0 ppm | ≤ 1.0 ppm |
| N2 | ≤ 5.0 ppm | ≤ 2.0 ppm |
| H2 | ≤ 1.0 ppm | ≤ 0.5 ppm |
| Ar | ≤ 2.0 ppm | ≤ 1.0 ppm |
| CnHm | ≤ 0.5 ppm | ≤ 0.5 ppm |
| CO | ≤ 1.0 ppm | ≤ 0.5 ppm |
| CO2 | ≤ 1.0 ppm | ≤ 0.5 ppm |
| CF4 | ≤ 1.0 ppm | ≤ 0.5 ppm |
| Xe | ≤ 5.0 ppm | ≤ 2.0 ppm |
| Low Purity Kr (N₂O) | ||
| H2O | ≤ 10.0 ppm | |
| O2+N2+H2+Xe | ≤ 1.0% | |
| NEON | |
|---|---|
| Components | Pure Neon (N50) |
| Ne | ≥ 99.999% |
| O2 | ≤ 0.1 ppm |
| N2 | ≤ 0.5 ppm |
| CO2 | ≤ 0.1 ppm |
| CO | ≤ 0.1 ppm |
| H2O | ≤ 0.1 ppm |
| H2 | ≤ 0.5 ppm |
| THC | ≤ 0.5 ppm |
| He | ≤ 3.0 ppm |